AN ELLIPSOMETRIC STUDY OF OXIDE-GROWTH ON NB, AL AND NB3AL FILMS BY RF PLASMA

被引：4

作者：

KATOH, Y

TANABE, K

MICHIKAMI, O

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1982年 / 21卷 / 02期

关键词：

D O I：

10.1143/JJAP.21.L100

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L100 / L102

页数：3

共 14 条

[1] CAPACITANCE AND ELLIPSOMETRICALLY DETERMINED OXIDE THICKNESS OF NB-OXIDE-PB JOSEPHSON TUNNEL-JUNCTIONS [J].

BASAVAIAH, S ;

GREINER, JH .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :4201-4202

[2] VARIATION OF CONCENTRATION WITH DEPTH OF ABSORBED OXYGEN IN NIOBIUM DURING OXIDATION [J].

BELLINA, JJ ;

ONEAL, JE ;

LEDERICH, RJ .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (02) :287-&

[3] FABRICATION AND PROPERTIES OF NIOBIUM JOSEPHSON TUNNEL-JUNCTIONS [J].

BROOM, RF ;

LAIBOWITZ, RB ;

MOHR, TO ;

WALTER, W .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (02) :212-222

[4] NIOBIUM OXIDE BARRIER TUNNEL JUNCTION [J].

BROOM, RF ;

RAIDER, SI ;

OOSENBRUG, A ;

DRAKE, RE ;

WALTER, W .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (10) :1998-2008

[5] AN ELLIPSOMETRIC STUDY OF THE RF SPUTTER OXIDATION OF LEAD-INDIUM ALLOYS [J].

DONALDSON, GB ;

FAGHIHINEJAD, H .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (10) :1988-1997

[6] JOSEPHSON TUNNELING BARRIERS BY RF SPUTTER ETCHING IN AN OXYGEN PLASMA [J].

GREINER, HJ .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (12) :5151-&

[7]

GREINER JH, 1974, J APPL PHYS, V45, P32, DOI 10.1063/1.1662979

[8] OPTICAL CONSTANTS AND REFLECTANCE AND TRANSMITTANCE OF EVAPORATED ALUMINUM IN VISIBLE AND ULTRAVIOLET [J].

HASS, G ;

WAYLONIS, JE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1961, 51 (07) :719-&

[9] ELLIPSOMETRIC STUDY ON RF-PLASMA OXIDIZED TUNNEL BARRIERS FOR IN-PB-AU-ALLOY JOSEPHSON-JUNCTIONS [J].

KURODA, K ;

WAHO, T ;

ISHIDA, A .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (08) :4513-4517

[10] NB3AL THIN-FILM SYNTHESIS BY ELECTRON-BEAM COEVAPORATION [J].

KWO, J ;

HAMMOND, RH ;

GEBALLE, TH .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (03) :1726-1732

← 1 2 →