EFFECT OF THE SPACE-CHARGE SHEATH ON PROPERTIES OF CARBON AND DIAMOND FILMS IN THE RF PLASMA-JET

被引：5

作者：

BARDOS, L ^{[1
]}

NYBERG, T ^{[1
]}

BARANKOVA, H ^{[1
]}

BERG, S ^{[1
]}

机构：

[1] UNIV UPPSALA,ANGSTROM CONSORTIUM THIN FILM PROC,BOX 534,S-75122 UPPSALA,SWEDEN

来源：

关键词：

D O I：

10.1016/0925-9635(94)90217-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Glassy carbon and diamond films were grown by an r.f. low pressure supersonic plasma jet. The effect of ion bombardment through the space charge sheath (e.g. by CH + ions) on the resulting film properties was substantially reduced by using an auxiliary mesh electrode to shield the substrate from the r.f. plasma jet. A positive d.c. potential on the substrate with respect to the mesh electrode was used to reduce the energy of ions passing the sheath towards the growing film. As a result a pronounced diamond peak at 1335 +/- 5 cm-1 appeared in the spectra corresponding to the biased case.

引用

页码：528 / 530

页数：3

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