共 34 条
[31]
SHIMURA F, 1985, 3RD P INT C VLSI, P507
[32]
TSAI HL, 1984, 42ND P ANN M EL MICR, P344
[33]
WEAST RC, 1972, CRC HDB CHEM PHYSICS, pB213
[34]
OXYGEN PRECIPITATION AND MICRODEFECTS IN CZOCHRALSKI-GROWN SILICON-CRYSTALS
[J].
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,
1984, 83 (01)
:207-217