CLUSTERING OF OXYGEN-ATOMS AROUND CARBON IN SILICON

被引:31
作者
FRAUNDORF, P
FRAUNDORF, GK
SHIMURA, F
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D O I
10.1063/1.335584
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O59 [应用物理学];
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页码:4049 / 4055
页数:7
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SHIMURA F, 1985, 3RD P INT C VLSI, P507
[32]  
TSAI HL, 1984, 42ND P ANN M EL MICR, P344
[33]  
WEAST RC, 1972, CRC HDB CHEM PHYSICS, pB213
[34]   OXYGEN PRECIPITATION AND MICRODEFECTS IN CZOCHRALSKI-GROWN SILICON-CRYSTALS [J].
YASUTAKE, K ;
UMENO, M ;
KAWABE, H .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 83 (01) :207-217