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DOUBLE-MESA-STRUCTURE VERTICAL-TO-SURFACE TRANSMISSION ELECTROPHOTONIC DEVICE WITH A VERTICAL CAVITY

被引：7
作者：
KURIHARA, K
NUMAI, T
OGURA, I
KOSAKA, H
SUGIMOTO, M
KASAHARA, K
机构：
[1] pto-Electronics Research Laboratories, NEC Corporation, Tsukuba, Ibaraki, 34, Miyukigaoka
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 1B期
关键词：
OPTICAL FUNCTIONAL INTERCONNECTION; OPTICAL FUNCTIONAL DEVICE; SURFACE-EMITTING LASER; 2-D INTEGRATION; ELECTRONIC-OPTICAL POWER CONVERSION EFFICIENCY; PROTON IMPLANTATION;
D O I：
10.1143/JJAP.32.604
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report a high electronic-optical power conversion efficiency of 11.4% in the laser operation of a double-mesa-structure vertical-to-surface transmission electro-photonic device with a vertical cavity. This high conversion efficiency is due to both reduction in the device resistance and increase in light emission efficiency. To reduce electrical resistance, a double mesa structure with a highly doped region is proposed and the resistance reduction is analyzed. To increase light emission efficiency, efficient carrier confinement in the active region by a proton-implanted structure, threshold current reduction by photon recycling, and decreased light absorption by annealing after proton implantation are utilized. Electronic-optical conversion efficiency of over 10% is achieved in surface-emitting devices for the first time to the authors' knowledge.
引用
收藏
页码：604 / 608
页数：5
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