HYDROGEN IN SI - DIFFUSION AND SHALLOW IMPURITY DEACTIVATION

被引：28

作者：

CAPIZZI, M

MITTIGA, A

机构：

来源：

PHYSICA B & C | 1987年 / 146卷 / 1-2期

关键词：

D O I：

10.1016/0378-4363(87)90048-9

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：19 / 29

页数：11

共 73 条

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