共 18 条
[3]
BROWN SC, 1967, BASIC DATA PLASMA PH, P143
[7]
MICROWAVE PLASMA CVD SYSTEM TO FABRICATE ALPHA-SI THIN-FILMS OUT OF PLASMA
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,
1983, 22 (01)
:L40-L42
[8]
MICROWAVE PLASMA CVD SYSTEM FOR THE FABRICATION OF THIN SOLID FILMS
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,
1982, 21 (08)
:L470-L472
[9]
KATO I, 1979, J OPT SOC AM, V69, P175, DOI 10.1364/JOSA.69.000175