ANALYSIS OF RADIAL-DISTRIBUTION OF PLASMA PARAMETERS IN A COAXIAL-LINE MICROWAVE-DISCHARGE TUBE

被引:4
作者
KATO, I
HARA, S
WAKANA, S
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D O I
10.1063/1.332798
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O59 [应用物理学];
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页码:4883 / 4888
页数:6
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