FOURIER-TRANSFORM INFRARED ELLIPSOMETRY OF THIN POLYMER-FILMS

被引:22
作者
GRAF, RT [1 ]
KOENIG, JL [1 ]
ISHIDA, H [1 ]
机构
[1] CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
关键词
PLASTICS FILMS - Spectroscopic Analysis - SPECTROMETERS; INFRARED; -; Applications; SPECTROSCOPY;
D O I
10.1021/ac00292a016
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Reflection spectra containing phase as well as intensity information were collected on a FT-IR spectrometer, using two linear polarizers. The sample consisted of a poly(vinyl acetate) (PVAc) film on a copper substrate. By the use of well-known principles of ellipsometry, the differential phase retardation ( DELTA ) and differential amplitude ( psi ) were calculated from these measurements. Given an independent measurement such as the frequency of the peak maxima of the carbonyl band of the PVAc, the thickness and optical constants of the film were calculated from the ellipsometric measurements.
引用
收藏
页码:64 / 68
页数:5
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