共 9 条
[1]
STUDY OF AL WITH A COMBINED AUGER-ELECTRON SPECTROMETER-ELLIPSOMETER SYSTEM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1976, 13 (01)
:112-115
[2]
ARCHER RJ, 1968, ELLIPSOMETRY, P13
[4]
EPITAXIAL LAYER THICKNESS MEASUREMENT BY FAR INFRARED ELLIPSOMETRY
[J].
APPLIED OPTICS,
1972, 11 (11)
:2534-&
[6]
Maissel L.I., 1970, HDB THIN FILM TECHNO
[9]
VASICEK A, 1960, OPTICS THIN FILMS, P289