INTERFACE ELLIPSOMETRY - AN OVERVIEW

被引：24

作者：

ASPNES, DE

机构：

来源：

SURFACE SCIENCE | 1980年 / 101卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(80)90600-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：84 / 98

页数：15

共 28 条

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ASPNES, DE ;

KINSBRON, E ;

BACON, DD .

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[2] HIGH PRECISION SCANNING ELLIPSOMETER [J].

ASPNES, DE ;

STUDNA, AA .

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[3] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].

ASPNES, DE ;

THEETEN, JB .

PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302

[4] OPTICAL-PROPERTIES OF THE INTERFACE BETWEEN SI AND ITS THERMALLY GROWN OXIDE [J].

ASPNES, DE ;

THEETEN, JB .

PHYSICAL REVIEW LETTERS, 1979, 43 (14) :1046-1050

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ASPNES, DE ;

STUDNA, AA .

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[6]

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BOWER, JR .

SURFACE SCIENCE, 1975, 49 (01) :253-263

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Bruggeman, DAG .

ANNALEN DER PHYSIK, 1935, 24 (07) :636-664

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SURFACE SCIENCE, 1969, 16 :166-&

[10] IMPLICATIONS OF 3 PARAMETER SOLUTIONS TO 3-LAYER MODEL [J].

CAHAN, BD .

SURFACE SCIENCE, 1976, 56 (01) :354-372

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