ION-BEAM MIXING OF CERAMIC-METAL INTERFACES

被引：26

作者：

CORTS, T ^{[1
]}

TRAVERSE, A ^{[1
]}

BOLSE, W ^{[1
]}

机构：

[1] UNIV GOTTINGEN,SONDERFORSCHUNGSBEREICH 345,W-3400 GOTTINGEN,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 80-1卷 / pt 2期

关键词：

D O I：

10.1016/0168-583X(93)96099-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In order to investigate the interplay between chemical and collisional effects during ion beam mixing of ceramic/metal interfaces, Ni3N- and TiN-coated Al and AlN-coated Ni, Cr, and Ti (d almost-equal-to 100 nm) were irradiated with 500 keV Xe ions at 80 K Rutherford backscattering spectrometry with 0.9-1.5 MeV alpha-particles and resonant nuclear reaction analysis via the reactions N-15(p,alphagamma) and Al-27(p,gamma) were used to determine the interfacial atomic distributions prior to and after irradiation. The mixing rate of the AlN/metal systems agrees well with the predictions of the ballistic model, while mixing of Ni3N/Al is clearly dominated by diffusion in a thermal spike. The slightly enhanced mixing in TiN/Al also hints at the contribution of a spike.

引用

页码：167 / 171

页数：5

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