RAPID CLEANING OF BORONIZED WALLS WITH A CHLORINE HYDROGEN GLOW-DISCHARGE

被引：6

作者：

TOYODA, H

HANAMI, A

SUGAI, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 07期

关键词：

Boron film; Chlorine plasma; Fast removal; In-situ coating; Nuclear fusion;

D O I：

10.1143/JJAP.29.1322

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Chlorine/hydrogen discharge cleaning was developed to remove boron films coated on walls of nuclear fusion devices. The removal rate of boron films (∼0.1 Å/s) was an order of magnitude faster than that obtained by conventional hydrogen discharges. Mass spectroscopic measurement revealed that BCl3 is a main volatile product in the removal process. Chlorine contaminants after film removal were cleaned up by additional hydrogen discharges. © 1990 The Japan Society of Applied Physics.

引用

页码：1322 / 1323

页数：2

共 8 条

[1] HYDROGEN RECYCLING CONTROL BY HELIUM ION-BOMBARDMENT ONTO CARBONIZED SURFACES [J].