Bragg diffraction peaks in x-ray diffuse scattering from multilayers with rough interfaces

The peaks in x-ray diffuse scattering appearing due to diffraction of incident or scattered waves on a periodically layered structure are sensitive to the perfection of multilayers. These peaks are investigated analytically and compared with numerical calculations. It is shown that, if the roughness of periodic interfaces is not correlated, the peaks follow the intensity of the x-ray standing wave on the interfaces. Interference effects due to correlated interfacial roughness can change the sense of the peak (sequence of maximum and minimum). The factors controlling the peak sense are derived and applied to explain the results of numerical calculations.