MONOSILICON AND DISILICON RADICALS IN SILANE AND SILANE-ARGON DC DISCHARGES

[1] Arthur N. L., 1978, Rev. Chem. Intermed, V2, P37

[2] ELECTRON-IMPACT IONIZATION AND DISSOCIATIVE IONIZATION OF THE CD3 AND CD2 FREE-RADICALS [J]. PHYSICAL REVIEW LETTERS, 1984, 53 (08) : 771 - 774

[3] PRODUCT DISTRIBUTIONS IN THE REACTIONS OF EXCITED NOBLE-GAS ATOMS WITH HYDROGEN-CONTAINING COMPOUNDS [J]. JOURNAL OF CHEMICAL PHYSICS, 1983, 79 (06) : 2822 - 2830

[4] A MONTE-CARLO ANALYSIS OF AN ELECTRON SWARM IN A NONUNIFORM FIELD - THE CATHODE REGION OF A GLOW-DISCHARGE IN HELIUM [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (11) : 2169 - 2187

[5] Boudart M., 2014, KINETICS HETEROGENEO

[6] Carlson D. E., 1980, Polycrystalline and amorphous thin films and devices, P175

[7] TOTAL AND PARTIAL ELECTRON COLLISIONAL IONIZATION CROSS-SECTIONS FOR CH4, C2H6, SIH4, AND SI2H6 [J]. JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (04) : 1770 - 1777

[8] ION CHEMISTRY IN SILANE DC DISCHARGES [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) : 159 - 169

[9] CHATHAM H, 1984, J CHEM PHYS, V79, P1301

[10] CHUTJIAN A, 1981, PHYS REV A, V23, P2178, DOI 10.1103/PhysRevA.23.2178

[1] Arthur N. L., 1978, Rev. Chem. Intermed, V2, P37

[2] ELECTRON-IMPACT IONIZATION AND DISSOCIATIVE IONIZATION OF THE CD3 AND CD2 FREE-RADICALS [J]. PHYSICAL REVIEW LETTERS, 1984, 53 (08) : 771 - 774

[3] PRODUCT DISTRIBUTIONS IN THE REACTIONS OF EXCITED NOBLE-GAS ATOMS WITH HYDROGEN-CONTAINING COMPOUNDS [J]. JOURNAL OF CHEMICAL PHYSICS, 1983, 79 (06) : 2822 - 2830

[4] A MONTE-CARLO ANALYSIS OF AN ELECTRON SWARM IN A NONUNIFORM FIELD - THE CATHODE REGION OF A GLOW-DISCHARGE IN HELIUM [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (11) : 2169 - 2187

[5] Boudart M., 2014, KINETICS HETEROGENEO

[6] Carlson D. E., 1980, Polycrystalline and amorphous thin films and devices, P175

[7] TOTAL AND PARTIAL ELECTRON COLLISIONAL IONIZATION CROSS-SECTIONS FOR CH4, C2H6, SIH4, AND SI2H6 [J]. JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (04) : 1770 - 1777

[8] ION CHEMISTRY IN SILANE DC DISCHARGES [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) : 159 - 169

[9] CHATHAM H, 1984, J CHEM PHYS, V79, P1301

[10] CHUTJIAN A, 1981, PHYS REV A, V23, P2178, DOI 10.1103/PhysRevA.23.2178