CONTRIBUTION OF THERMAL SIO2 LAYERS ON SI WAFER BACK SURFACES TO PHOTOCONDUCTIVE DECAY TIME MEASURED WITH MICROWAVE REFLECTION FROM FRONT SURFACES

被引：5

作者：

MUNAKATA, C

HONMA, N

TAMURA, H

YAGI, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 06期

关键词：

D O I：

10.1143/JJAP.28.1143

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1143 / 1144

页数：2

共 6 条

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HONMA, N ;

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[2] COMPARISON OF MINORITY-CARRIER LIFETIMES MEASURED BY PHOTOCONDUCTIVE DECAY AND AC PHOTOVOLTAIC METHOD [J].

HONMA, N ;

MUNAKATA, C ;

SHIMIZU, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 (08) :1498-1503

[3] AC SURFACE PHOTOVOLTAGES IN STRONGLY-INVERTED OXIDIZED P-TYPE SILICON-WAFERS [J].

MUNAKATA, C ;

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HONMA, N ;

YAGI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1984, 23 (11) :1451-1461

[4] A NON-DESTRUCTIVE METHOD FOR MEASURING LIFETIMES FOR MINORITY-CARRIERS IN SEMICONDUCTOR WAFERS USING FREQUENCY-DEPENDENT AC PHOTOVOLTAGES [J].

MUNAKATA, C ;

HONMA, N ;

ITOH, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (02) :L103-L105

[5] AC SURFACE PHOTOVOLTAGES IN P-TYPE SILICON-WAFERS OXIDIZED IN WATER-FREE AND WET AMBIENTS [J].

MUNAKATA, C ;

TAMURA, H ;

HONMA, N ;

OZAWA, M ;

YAGI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 (09) :1770-1771

[6]

USAMI A, 1982, 16TH IEEE PHOT SPEC, P752

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