A NON-DESTRUCTIVE METHOD FOR MEASURING LIFETIMES FOR MINORITY-CARRIERS IN SEMICONDUCTOR WAFERS USING FREQUENCY-DEPENDENT AC PHOTOVOLTAGES

被引：26

作者：

MUNAKATA, C

HONMA, N

ITOH, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1983年 / 22卷 / 02期

关键词：

D O I：

10.1143/JJAP.22.L103

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L103 / L105

页数：3

共 15 条

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