EVALUATION OF INTERFACE DEFECTS AND THE EFFECT OF IODINE IMPURITY IN LOW-RESISTIVITY METAL-ORGANIC CHEMICAL VAPOR DEPOSITION-GROWN ZNS FILMS ON GAAS

被引：24

作者：

KAWAKAMI, Y

TAGUCHI, T

HIRAKI, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.583706

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1171 / 1178

页数：8

共 17 条

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