INTERFACIAL EFFECTS DUE TO TUNNELING TO INSULATOR GAP STATES IN AMORPHOUS-CARBON ON SILICON METAL-INSULATOR-SEMICONDUCTOR STRUCTURES

被引:34
作者
KHAN, AA
WOOLLAM, JA
CHUNG, Y
机构
[1] UNIV NEBRASKA,DEPT ELECT ENGN,LINCOLN,NE 68588
[2] UNIVERSAL ENERGY SYST,DAYTON,OH 45432
关键词
D O I
10.1063/1.333040
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4299 / 4303
页数:5
相关论文
共 21 条
[1]   ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].
AISENBERG, S ;
CHABOT, R .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+
[2]   SPRAY-DEPOSITED ITO-SILICON SIS HETEROJUNCTION SOLAR-CELLS [J].
ASHOK, S ;
SHARMA, PP ;
FONASH, SJ .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (04) :725-730
[3]   DIAMOND-LIKE CARBON-FILMS PRODUCED IN A BUTANE PLASMA [J].
BERG, S ;
ANDERSSON, LP .
THIN SOLID FILMS, 1979, 58 (01) :117-120
[4]   ELECTRICAL MODELING OF COMPOUND SEMICONDUCTOR INTERFACE FOR FET DEVICE ASSESSMENT [J].
HASEGAWA, H ;
SAWADA, T .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (06) :1055-1061
[5]   EFFECTS OF OXIDE TRAPS ON MOS CAPACITANCE [J].
HEIMAN, FP ;
WARFIELD, G .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1965, ED12 (04) :167-&
[6]   DEPOSITION OF HARD AND INSULATING CARBONACEOUS FILMS ON AN RF TARGET IN A BUTANE PLASMA [J].
HOLLAND, L ;
OJHA, SM .
THIN SOLID FILMS, 1976, 38 (02) :L17-L19
[7]   PROPERTIES OF GAAS-AL2O3 AND INP-AL2O3 INTERFACES AND THE FABRICATION OF MIS FIELD-EFFECT TRANSISTORS [J].
KAMIMURA, K ;
SAKAI, Y .
THIN SOLID FILMS, 1979, 56 (1-2) :215-223
[8]  
KHAN AA, 1983, ELECTRON DEVICES LET, V4, P146
[9]  
KHAN AA, SOLID STATE ELECTRON
[10]   PHOTOELECTRIC EFFECTS OF IN2O3-P SI DIODES [J].
MATSUNAMI, H ;
OO, K ;
ITO, H ;
TANAKA, T .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1975, 14 (06) :915-916