ACTIVATION-ENERGY AND SPECTROSCOPY OF THE GROWTH OF GERMANIUM FILMS BY ULTRAVIOLET LASER-ASSISTED CHEMICAL VAPOR-DEPOSITION

被引：64

作者：

OSMUNDSEN, JF

ABELE, CC

EDEN, JG

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 08期

关键词：

D O I：

10.1063/1.335232

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2921 / 2930

页数：10

共 29 条

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