VACUUM DEPOSITION ONTO SOFTENABLE SUBSTRATES - FORMATION OF NOVEL SUBSURFACE STRUCTURES

被引：53

作者：

KOVACS, GJ

VINCETT, PS

TREMBLAY, C

PUNDSACK, AL

机构：

来源：

THIN SOLID FILMS | 1983年 / 101卷 / 01期

关键词：

D O I：

10.1016/0040-6090(83)90490-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：21 / 40

页数：20

共 30 条

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[6]

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[8]

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[9]

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