DETERMINATION OF WAVELENGTH AND EXCITATION VOLTAGE FOR X-RAY LITHOGRAPHY

被引：18

作者：

SULLIVAN, PA ^{[1
]}

MCCOY, JH ^{[1
]}

机构：

[1] HUGHES RES LABS,MALIBU,CA 90265

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1976年 / 23卷 / 04期

关键词：

D O I：

10.1109/T-ED.1976.18418

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：412 / 418

页数：7

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