PLASMA SOURCE ION-IMPLANTATION - A NEW APPROACH TO ION-BEAM MODIFICATION OF MATERIALS

被引：62

作者：

CONRAD, JR

机构：

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1989年 / 116卷

关键词：

D O I：

10.1016/0921-5093(89)90146-9

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：197 / 203

页数：7

相关论文

共 14 条

[1] TRANSIENT PLASMA SHEATH - DISCOVERED BY ION-ACOUSTIC WAVES
ALEXEFF, I
JONES, WD
LONNGREN, K
MONTGOMERY, D
[J]. PHYSICS OF FLUIDS, 1969, 12 (02) : 345 - +
[2] SHEATH GROWTH IN A LOW PRESSURE PLASMA
ANDREWS, JG
VAREY, RH
[J]. PHYSICS OF FLUIDS, 1971, 14 (02) : 339 - &
[3] SHEATH THICKNESS AND POTENTIAL PROFILES OF ION-MATRIX SHEATHS FOR CYLINDRICAL AND SPHERICAL ELECTRODES
CONRAD, JR
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (03) : 777 - 779
[4] PLASMA SOURCE ION-IMPLANTATION TECHNIQUE FOR SURFACE MODIFICATION OF MATERIALS
CONRAD, JR
RADTKE, JL
DODD, RA
WORZALA, FJ
TRAN, NC
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (11) : 4591 - 4596
[5] CONRAD JR, 1988, MAY P ASM C ION IMPL, P185
[6] CONRAD JR, UNPUB J APPL PHYS
[7] CONRAD JR, 1988, APR P INT C MET COAT, P927
[8] GRABOWSKI KS, 1984, NOV ION IMPL ION BEA, V27, P615
[9] MEEKER GP, 1988, JUN P INT CC ION BEA
[10] MANUFACTURING TECHNOLOGY PROGRAM TO DEVELOP A PRODUCTION ION-IMPLANTATION FACILITY FOR PROCESSING BEARINGS AND TOOLS
SMIDT, FA
SARTWELL, BD
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) : 70 - 77