QUARTZ CRYSTAL MICROBALANCE MEASUREMENTS OF ABSOLUTE LASER PHOTODEPOSITION RATES - APPLICATION TO 257-NM DEPOSITION FROM W-(CO)6

被引：16

作者：

JACKSON, RL

TYNDALL, GW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 01期

关键词：

D O I：

10.1063/1.339151

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：315 / 317

页数：3

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