ON THE MICROSTRUCTURE, CHEMISTRY, AND DIELECTRIC FUNCTION OF BATIO3 MOCVD THIN-FILMS

被引:14
作者
DRAVID, VP [1 ]
ZHANG, H [1 ]
WILLS, LA [1 ]
WESSELS, BW [1 ]
机构
[1] NORTHWESTERN UNIV,MAT RES CTR,EVANSTON,IL 60208
基金
美国国家科学基金会;
关键词
D O I
10.1557/JMR.1994.0426
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin films of BaTiO3 deposited on (100)LaAlO3 substrate by metal-organic chemical vapor deposition (MOCVD) are investigated using several electron-optical techniques. Combined high resolution transmission electron microscopy (HRTEM), electron energy loss spectrometry (EELS), and convergent beam electron diffraction (CBED) indicate a substantial influence of lattice strain on the structural and optical characteristics of BaTiO3 films. Spatially resolved EELS and CBED studies indicate that the substrate influence persists up to about 40 nm away from the interface. The changes in the dielectric function of the films, as inferred from spatially resolved EELS, appear to correlate well with internal lattice strain in the films as deduced from convergent beam electron diffraction (CBED).
引用
收藏
页码:426 / 430
页数:5
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