A HIGH-EFFICIENCY, HIGH-REPETITION-RATE KRF(B-]X) EXCIMER LAMP EXCITED BY MICROWAVE-DISCHARGE

被引：12

作者：

KUMAGAI, H

OBARA, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 12期

关键词：

D O I：

10.1143/JJAP.28.L2228

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L2228 / L2231

页数：4

共 11 条

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[7] THEORETICAL AND EXPERIMENTAL-STUDY OF KRF FLUORESCENCE IN A MULTIMICROSECOND LONGITUDINAL DISCHARGE [J].

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