SURFACE-ROUGHNESS EVOLUTION ON GLOW-DISCHARGE A-SI-H

被引：15

作者：

COLLINS, RW

CAVESE, JM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 04期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.338059

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1662 / 1664

页数：3

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