DISORDERING OF SI-IMPLANTED GAAS-ALGAAS SUPERLATTICES BY RAPID THERMAL ANNEALING

被引：19

作者：

LEE, ST

BRAUNSTEIN, G

FELLINGER, P

KAHEN, KB

RAJESWARAN, G

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 25期

关键词：

D O I：

10.1063/1.100199

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2531 / 2533

页数：3

共 17 条

[1] KINETICS OF IMPLANTATION ENHANCED INTERDIFFUSION OF GA AND AL AT GAAS-GAXAL1-XAS INTERFACES [J].

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PETROFF, PM ;

WERDER, DJ ;

PEARTON, SJ ;

GOSSARD, AC ;

ENGLISH, JH .

APPLIED PHYSICS LETTERS, 1986, 49 (04) :223-225

[2] DISORDER OF AN ALAS-GAAS SUPER-LATTICE BY SILICON IMPLANTATION [J].

COLEMAN, JJ ;

DAPKUS, PD ;

KIRKPATRICK, CG ;

CAMRAS, MD ;

HOLONYAK, N .

APPLIED PHYSICS LETTERS, 1982, 40 (10) :904-906

[3] IMPLANTATION DISORDERING OF ALXGA1-XAS SUPERLATTICES [J].

GAVRILOVIC, P ;

DEPPE, DG ;

MEEHAN, K ;

HOLONYAK, N ;

COLEMAN, JJ ;

BURNHAM, RD .

APPLIED PHYSICS LETTERS, 1985, 47 (02) :130-132

[4] SI-IMPLANTED AND DISORDERED STRIPE-GEOMETRY ALXGA1-XAS-GAAS QUANTUM WELL LASERS [J].

GAVRILOVIC, P ;

MEEHAN, K ;

GUIDO, LJ ;

HOLONYAK, N ;

EU, V ;

FENG, M ;

BURNHAM, RD .

APPLIED PHYSICS LETTERS, 1985, 47 (09) :903-905

[5] COMPOSITIONAL DISORDERING OF GAAS-ALXGA1-XAS SUPERLATTICE BY GA FOCUSED ION-BEAM IMPLANTATION AND ITS APPLICATION TO SUB-MICRON STRUCTURE FABRICATION [J].

HIRAYAMA, Y ;

SUZUKI, Y ;

TARUCHA, S ;

OKAMOTO, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1985, 24 (07) :L516-L518

[6] MECHANISM FOR ION-INDUCED MIXING OF GAAS-ALGAAS INTERFACES BY RAPID THERMAL ANNEALING [J].

KAHEN, KB ;

RAJESWARAN, G ;

LEE, ST .

APPLIED PHYSICS LETTERS, 1988, 53 (17) :1635-1637

[7] ALUMINUM ION-IMPLANTATION ENHANCED INTERMIXING OF GAAS-ALGAAS QUANTUM-WELL STRUCTURES [J].

KASH, K ;

TELL, B ;

GRABBE, P ;

DOBISZ, EA ;

CRAIGHEAD, HG ;

TAMARGO, MC .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (01) :190-194

[8] EFFECT OF RAPID THERMAL ANNEALING FOR THE COMPOSITIONAL DISORDERING OF SI-IMPLANTED ALGAAS/GAAS SUPERLATTICES [J].

KOBAYASHI, J ;

FUKUNAGA, T ;

ISHIDA, K ;

NAKASHIMA, H ;

FLOOD, JD ;

BAHIR, G ;

MERZ, JL .

APPLIED PHYSICS LETTERS, 1987, 50 (09) :519-521

[9]

LAIDIG WD, 1981, APPL PHYS LETT, V38, P776, DOI 10.1063/1.92159

[10] INDUCED DISORDER OF ALAS-ALGAAS-GAAS QUANTUM-WELL HETEROSTRUCTURES [J].

LAIDIG, WD ;

HOLONYAK, N ;

COLEMAN, JJ ;

DAPKUS, PD .

JOURNAL OF ELECTRONIC MATERIALS, 1982, 11 (01) :1-20

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