EFFECT OF RAPID THERMAL ANNEALING FOR THE COMPOSITIONAL DISORDERING OF SI-IMPLANTED ALGAAS/GAAS SUPERLATTICES

被引：15

作者：

KOBAYASHI, J ^{[1
]}

FUKUNAGA, T ^{[1
]}

ISHIDA, K ^{[1
]}

NAKASHIMA, H ^{[1
]}

FLOOD, JD ^{[1
]}

BAHIR, G ^{[1
]}

MERZ, JL ^{[1
]}

机构：

[1] UNIV CALIF SANTA BARBARA,DEPT ELECT & COMP ENGN,SANTA BARBARA,CA 93106

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 09期

关键词：

D O I：

10.1063/1.98145

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：519 / 521

页数：3

共 10 条

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[2] GAALAS BURIED MULTIQUANTUM WELL LASERS FABRICATED BY DIFFUSION-INDUCED DISORDERING [J].

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APPLIED PHYSICS LETTERS, 1984, 45 (01) :1-3

[3] INTERDIFFUSION OF AL AND GA IN SI-IMPLANTED GAAS-ALAS SUPERLATTICES [J].

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[4]

KASAHARA J, 1982, SEMIINSULATING 3 5 M, P238

[5] DISORDERING OF SI-DOPED ALAS/GAAS SUPERLATTICE BY ANNEALING [J].

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[6]

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[7] SIMS STUDY OF COMPOSITIONAL DISORDERING IN SI ION-IMPLANTED ALGAAS-GAAS SUPERLATTICE [J].

KOBAYASHI, J ;

NAKAJIMA, M ;

BAMBA, Y ;

FUKUNAGA, T ;

MATSUI, K ;

ISHIDA, K ;

NAKASHIMA, H ;

ISHIDA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (05) :L385-L387

[8] SIMS STUDY OF SI-BE CO-DOPING EFFECTS FOR SUPPRESSION OF COMPOSITIONAL DISORDERING IN ALGAAS-GAAS SUPERLATTICES [J].

KOBAYASHI, J ;

NAKAJIMA, M ;

FUKUNAGA, T ;

TAKAMORI, T ;

ISHIDA, K ;

NAKASHIMA, H ;

ISHIDA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (09) :L736-L738

[9] DISORDER OF AN ALXGA1-XAS-GAAS SUPERLATTICE BY DONOR DIFFUSION [J].

MEEHAN, K ;

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APPLIED PHYSICS LETTERS, 1984, 45 (05) :549-551

[10]

TATSUTA S, 1985, MATER RES SOC S P, V37, P23

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