DIMER AND TETRAMER FORMATION IN AN ASH3 CRACKER STUDIED BY CALIBRATED QUADRUPOLE MASS-SPECTROMETRY

被引:12
作者
LOHE, C [1 ]
KOHL, CD [1 ]
机构
[1] RHEIN WESTFAL TH AACHEN, INST PHYS 2, D-5100 AACHEN, FED REP GER
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 02期
关键词
D O I
10.1116/1.584720
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:217 / 224
页数:8
相关论文
共 42 条
[1]   INTERACTION OF GA AND AS2 MOLECULAR BEAMS WITH GAAS SURFACES [J].
ARTHUR, JR .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (08) :4032-&
[2]   SURFACE STOICHIOMETRY AND STRUCTURE OF GAAS [J].
ARTHUR, JR .
SURFACE SCIENCE, 1974, 43 (02) :449-461
[3]   THE THERMAL AND ION-ASSISTED REACTIONS OF GAAS(100) WITH MOLECULAR CHLORINE [J].
BALOOCH, M ;
OLANDER, DR ;
SIEKHAUS, WJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (04) :794-805
[4]   QUADRUPOLE GAS ANALYZERS [J].
BATEY, JH .
VACUUM, 1987, 37 (8-9) :659-668
[5]   COMMENTS ON ACCURACY IN MASS-SPECTROMETRIC GAS-ANALYSIS [J].
BRETH, A ;
DOBROZEMSKY, R ;
KRAUS, B .
VACUUM, 1983, 33 (1-2) :73-76
[6]   ON THE USE OF ASH3 IN THE MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAAS [J].
CALAWA, AR .
APPLIED PHYSICS LETTERS, 1981, 38 (09) :701-703
[7]  
Dawson P.H., 1976, QUADRUPOLE MASS SPEC
[8]   DETERMINATION OF TRANSMISSION CHARACTERISTICS IN MASS FILTERS [J].
EHLERT, TC .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1970, 3 (03) :237-&
[9]  
Espe W., 1960, WERKSTOFFKUNDE HOCHV, V1
[10]  
FISCHER J, THESIS PHYSIKALISCHE