INFRARED OPTICAL-PROPERTIES OF ELECTRON-BEAM EVAPORATED SILICON OXYNITRIDE FILMS

被引：37

作者：

ERIKSSON, TS

GRANQVIST, CG

机构：

来源：

APPLIED OPTICS | 1983年 / 22卷 / 20期

关键词：

D O I：

10.1364/AO.22.003204

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

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页码：3204 / 3206

页数：3

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