THERMAL-DECOMPOSITION OF METALORGANIC COMPOUNDS USED IN THE MOCVD OF INP

[1] Aylett M. R., 1983, Laser Diagnostics and Photochemical Processing for Semiconductor Devices. Proceedings of a Symposium, P177

[2] METAL ORGANIC VAPOR-PHASE EPITAXY OF INDIUM-PHOSPHIDE [J]. JOURNAL OF CRYSTAL GROWTH, 1983, 64 (01) : 68 - 75

[3] CHATTERJEE AK, 1982, INT M RELATIONSHIP E

[4] TRIMETHYLGALLIUM .1. THE RELATIVE STABILITIES OF ITS COORDINATION COMPOUNDS WITH THE METHYL DERIVATIVES OF GROUP-VB AND GROUP-VIB, AND THE THERMAL DECOMPOSITION OF SOME TRIMETHYLGALLIUM-AMINE COMPLEXES [J]. JOURNAL OF THE CHEMICAL SOCIETY, 1951, (AUG): : 2003 - 2013

[5] COATES GE, 1956, J CHEM SOC, P2351

[6] EXCIMER LASER-INDUCED DEPOSITION OF INP AND INDIUM-OXIDE FILMS [J]. APPLIED PHYSICS LETTERS, 1984, 44 (10) : 951 - 953

[7] Duchemin J.-P., 1979, INST PHYS CONF SE, V45, P10

[8] PHOTODEPOSITION OF METAL-FILMS WITH ULTRAVIOLET-LASER LIGHT [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01): : 23 - 32

[9] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) : 1233 - 1243

[10] THE VAPOR-PHASE ULTRAVIOLET-SPECTRA OF METALLO-ORGANIC PRECURSORS TO III-V-COMPOUNDS [J]. JOURNAL OF MATERIALS SCIENCE, 1983, 18 (04) : 1072 - 1076

[1] Aylett M. R., 1983, Laser Diagnostics and Photochemical Processing for Semiconductor Devices. Proceedings of a Symposium, P177

[2] METAL ORGANIC VAPOR-PHASE EPITAXY OF INDIUM-PHOSPHIDE [J]. JOURNAL OF CRYSTAL GROWTH, 1983, 64 (01) : 68 - 75

[3] CHATTERJEE AK, 1982, INT M RELATIONSHIP E

[4] TRIMETHYLGALLIUM .1. THE RELATIVE STABILITIES OF ITS COORDINATION COMPOUNDS WITH THE METHYL DERIVATIVES OF GROUP-VB AND GROUP-VIB, AND THE THERMAL DECOMPOSITION OF SOME TRIMETHYLGALLIUM-AMINE COMPLEXES [J]. JOURNAL OF THE CHEMICAL SOCIETY, 1951, (AUG): : 2003 - 2013

[5] COATES GE, 1956, J CHEM SOC, P2351

[6] EXCIMER LASER-INDUCED DEPOSITION OF INP AND INDIUM-OXIDE FILMS [J]. APPLIED PHYSICS LETTERS, 1984, 44 (10) : 951 - 953

[7] Duchemin J.-P., 1979, INST PHYS CONF SE, V45, P10

[8] PHOTODEPOSITION OF METAL-FILMS WITH ULTRAVIOLET-LASER LIGHT [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01): : 23 - 32

[9] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) : 1233 - 1243

[10] THE VAPOR-PHASE ULTRAVIOLET-SPECTRA OF METALLO-ORGANIC PRECURSORS TO III-V-COMPOUNDS [J]. JOURNAL OF MATERIALS SCIENCE, 1983, 18 (04) : 1072 - 1076