MASS ANALYZED SECONDARY ION MICROSCOPY

被引:16
作者
BERNIUS, MT [1 ]
MORRISON, GH [1 ]
机构
[1] CORNELL UNIV,BAKER LAB,ITHACA,NY 14853
关键词
D O I
10.1063/1.1139523
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:1789 / 1804
页数:16
相关论文
共 79 条
[31]  
DRUMMOND I, 1968, THESIS U CAMBRIDGE U
[32]   SCANNING ION MICROSCOPY AND ION BEAM MICRO-MACHINING [J].
DRUMMOND, IW ;
LONG, JVP .
NATURE, 1967, 215 (5104) :950-&
[33]  
GILLEN G, 1986, MICROBEAM ANAL 1986, P109
[34]   H-2 AND RARE-GAS FIELD-ION SOURCE WITH HIGH ANGULAR CURRENT [J].
HANSON, GR ;
SIEGEL, BM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1875-1878
[35]   A COMPARISON OF SIMULATED AND EXPERIMENTAL DISPLACEMENT CASCADE DIMENSIONS IN CU3AU [J].
HEINISCH, HL .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1982, 45 (06) :1085-1088
[36]   ANALYSIS OF CARBON AND OXYGEN IN GAAS USING A SECONDARY ION MASS-SPECTROMETER EQUIPPED WITH A 20-K-CRYOPANEL PUMPING SYSTEM [J].
HOMMA, Y ;
ISHII, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02) :356-360
[37]   HIGH SPATIAL-RESOLUTION SIMS WITH THE UC-HRL SCANNING ION MICROPROBE [J].
LEVISETTI, R ;
WANG, YL ;
CROW, G .
JOURNAL DE PHYSIQUE, 1984, 45 (NC9) :197-205
[38]  
LEVISETTI R, 1985, SCANNING ELECTRON MI, V2, P535
[39]  
LEVISETTI R, IN PRESS SCANNING MI
[40]  
LEVISETTI R, COMMUNICATION