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PATTERN FIDELITY IN SUB-MICRON LITHOGRAPHY WITH A RECTANGULAR ELECTRON-BEAM
被引:8
作者
:
OKUBO, T
论文数:
0
引用数:
0
h-index:
0
OKUBO, T
TAKAMOTO, K
论文数:
0
引用数:
0
h-index:
0
TAKAMOTO, K
机构
:
来源
:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
|
1983年
/ 22卷
/ 08期
关键词
:
D O I
:
10.1143/JJAP.22.1335
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:1335 / 1341
页数:7
相关论文
共 12 条
[11]
VARIABLY SHAPED ELECTRON-BEAM LITHOGRAPHY SYSTEM, EB55 .2. ELECTRON OPTICS
SAITOU, N
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
SAITOU, N
OZASA, S
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
OZASA, S
KOMODA, T
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
KOMODA, T
TATSUNO, G
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
TATSUNO, G
UNO, Y
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
UNO, Y
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981,
19
(04):
: 1087
-
1093
[12]
VARIABLE-SHAPED ELECTRON-BEAM DIRECT WRITING TECHNOLOGY FOR 1-MU-M VLSI FABRICATION
SAKAKIBARA, Y
论文数:
0
引用数:
0
h-index:
0
SAKAKIBARA, Y
OGAWA, T
论文数:
0
引用数:
0
h-index:
0
OGAWA, T
KOMATSU, K
论文数:
0
引用数:
0
h-index:
0
KOMATSU, K
MORIYA, S
论文数:
0
引用数:
0
h-index:
0
MORIYA, S
KOBAYASHI, M
论文数:
0
引用数:
0
h-index:
0
KOBAYASHI, M
KOBAYASHI, T
论文数:
0
引用数:
0
h-index:
0
KOBAYASHI, T
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1981,
28
(11)
: 1279
-
1284
←
1
2
→
共 12 条
[11]
VARIABLY SHAPED ELECTRON-BEAM LITHOGRAPHY SYSTEM, EB55 .2. ELECTRON OPTICS
SAITOU, N
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
SAITOU, N
OZASA, S
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
OZASA, S
KOMODA, T
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
KOMODA, T
TATSUNO, G
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
TATSUNO, G
UNO, Y
论文数:
0
引用数:
0
h-index:
0
机构:
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
UNO, Y
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981,
19
(04):
: 1087
-
1093
[12]
VARIABLE-SHAPED ELECTRON-BEAM DIRECT WRITING TECHNOLOGY FOR 1-MU-M VLSI FABRICATION
SAKAKIBARA, Y
论文数:
0
引用数:
0
h-index:
0
SAKAKIBARA, Y
OGAWA, T
论文数:
0
引用数:
0
h-index:
0
OGAWA, T
KOMATSU, K
论文数:
0
引用数:
0
h-index:
0
KOMATSU, K
MORIYA, S
论文数:
0
引用数:
0
h-index:
0
MORIYA, S
KOBAYASHI, M
论文数:
0
引用数:
0
h-index:
0
KOBAYASHI, M
KOBAYASHI, T
论文数:
0
引用数:
0
h-index:
0
KOBAYASHI, T
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1981,
28
(11)
: 1279
-
1284
←
1
2
→