PRACTICAL LIMITATIONS TO ACCURACY IN A NULLING AUTOMATIC WAVELENGTH-SCANNING ELLIPSOMETER

被引：13

作者：

LOWE, AC ^{[1
]}

机构：

[1] IBM UNITED KINGDOM LTD,CTR MFG TECHNOL,SOUTHAMPTON,HAMPSHIRE,ENGLAND

来源：

关键词：

D O I：

10.1016/0039-6028(76)90441-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：134 / 147

页数：14

共 8 条

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[2] BENNETT AH, 1973, Patent No. 54514
[3] CHAMBERS DL, IN PRESS
[4] SOME APPLICATIONS OF THIN FILMS TO POLARIZATION DEVICES
CLAPHAM, PB
DOWNS, MJ
KING, RJ
[J]. APPLIED OPTICS, 1969, 8 (10): : 1965 - &
[5] A MODIFIED METHOD FOR CALIBRATING ANALYSER AND POLARIZER IN AN ELLIPSOMETER
FORGACS, G
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1970, 3 (10) : 1513 - &
[6] SOME ASPECTS OF POLARIZER PERFORMANCE
KING, RJ
TALIM, SP
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1971, 4 (02): : 93 - &
[7] LOWE AC, 1976, IBM TECH DISCLOSURE, V18, P3433
[8] ELLIPSOMETRIC ANALYSES FOR AN ABSORBING SURFACE FILM ON AN ABSORBING SUBSTRATE WITH OR WITHOUT AN INTERMEDIATE SURFACE-LAYER
SO, SS
[J]. SURFACE SCIENCE, 1976, 56 (01) : 97 - 108