OPTICAL AND ELECTRICAL-PROPERTIES OF RF-SPUTTERED INDIUM TIN OXIDE-FILMS

被引：71

作者：

SZCZYRBOWSKI, J ^{[1
]}

DIETRICH, A ^{[1
]}

HOFFMANN, H ^{[1
]}

机构：

[1] UNIV REGENSBURG,INST ANGEW PHYS,D-8400 REGENSBURG,FED REP GER

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1983年 / 78卷 / 01期

关键词：

D O I：

10.1002/pssa.2210780129

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：243 / 252

页数：10

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[9] OPTICAL-PROPERTIES OF RF-SPUTTERED INDIUM OXIDE-FILMS [J].

SZCZYRBOWSKI, J ;

DIETRICH, A ;

HOFFMANN, H .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 69 (01) :217-226

[10] DETERMINATION OF OPTICAL-CONSTANTS OF FILMS [J].

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