CHARACTERIZATION OF HIGH-PURITY GAAS FILMS GROWN BY MOLECULAR-BEAM EPITAXY FROM A SOLID AS CRACKER

被引：5

作者：

CHOW, R

FERNANDEZ, R

ATCHLEY, D

CHAN, K

BLISS, D

机构：

[1] VARIAN ASSOCIATES INC,DIV THIN FILM TECHNOL,MBE OPERAT,SANTA CLARA,CA 95054

[2] HEWLETT PACKARD CO,DIV MICROWAVE TECHNOL,SANTA ROSA,CA 94501

[3] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,BERKELEY,CA 94720

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 02期

关键词：

D O I：

10.1116/1.584846

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：163 / 167

页数：5

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