SIMULTANEOUS CHARGED-PARTICLE ACTIVATION-ANALYSIS OF CARBON AND BORON IN GALLIUM-ARSENIDE

被引:7
作者
NOZAKI, T [1 ]
ITOH, Y [1 ]
OHKUBO, Y [1 ]
KIMURA, T [1 ]
FUKUSHIMA, H [1 ]
机构
[1] JAPAN CHEM ANAL CTR,CHIBA 281,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1985年 / 24卷 / 10期
关键词
D O I
10.1143/JJAP.24.L801
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L801 / L802
页数:2
相关论文
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