HIGHLY PHOTOCONDUCTIVE AND PHOTOSENSITIVE HYDROGENATED AMORPHOUS-SILICON CARBON ALLOY-FILMS PREPARED BY MAGNETRON SPUTTERING

被引：21

作者：

SAITO, N

机构：

[1] Shizuoka Univ, Research Inst of, Electronics, Hamamatsu, Jpn, Shizuoka Univ, Research Inst of Electronics, Hamamatsu, Jpn

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 01期

关键词：

DARK CONDUCTIVITY - MAGNETRON SPUTTERING;

D O I：

10.1063/1.95853

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：61 / 63

页数：3

共 32 条

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