HEAT-TRANSFER IN SILICON CZOCHRALSKI CRYSTAL-GROWTH

被引:40
作者
WILLIAMS, G [1 ]
REUSSER, RE [1 ]
机构
[1] WESTERN ELECT CO INC,ALLENTOWN WORKS,ALLENTOWN,PA 18103
关键词
D O I
10.1016/0022-0248(83)90328-7
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:448 / 460
页数:13
相关论文
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