NOVEL TECHNIQUE FOR DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON THIN-FILMS

被引：4

作者：

ROBERTSON, PA

MILNE, WI

机构：

来源：

ELECTRONICS LETTERS | 1986年 / 22卷 / 11期

关键词：

D O I：

10.1049/el:19860410

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：603 / 605

页数：3

相关论文

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