MOSSBAUER-SPECTRA AND STRUCTURES OF FE/FE-N MULTILAYERED FILMS FORMED BY FE SPUTTERING AND ECR-NITROGEN PLASMA EXPOSURE

被引：4

作者：

ONO, H

FUJINAGA, M

YONEMOTO, T

MIYAGAWA, T

KITANO, Y

机构：

[1] 2nd Research Group, RIMES Ltd., Technical Research Division, Chiba, 260

[2] Technical Research Dividion, Kawasaki Steel Corporation, Chiba, 260

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1993年 / 118卷 / 03期

关键词：

D O I：

10.1016/0304-8853(93)90438-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fe/Fe-N multilayered films were prepared by an alternation of Fe sputtering and Electron Cyclotron Resonance (ECR) nitrogen plasma exposure, and the films were investigated by Fe-57 Conversion Electron Mossbauer Spectroscopy (CEMS). ECR nitrogen plasma exposure of the sputtered Fe layers generated fine crystal epsilon-Fe2-3N and Fe2N grains, rather than thermally stable gamma'-Fe4N. The Fe/Fe-N multilayered films has a periodic structure of [alpha-Fe]/[epsilon-Fe2-3N and Fe2N], and showed good soft magnetic properties.

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页码：352 / 358

页数：7

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