PHOTOTHERMAL DISPLACEMENT TECHNIQUE - A METHOD TO DETERMINE THE VARIATION OF THERMAL-CONDUCTIVITY VERSUS TEMPERATURE IN SILICON

被引：4

作者：

BENEDETTO, G ^{[1
]}

SPAGNOLO, R ^{[1
]}

BOARINO, L ^{[1
]}

机构：

[1] UNIV TURIN,CONSORZIO INFM,UNITA TORINO,I-10125 TURIN,ITALY

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 08期

关键词：

D O I：

10.1063/1.1143966

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A method to determine the variation of thermal conductivity as a function of temperature in silicon is described. The method is based on the application of a photothermal displacement technique in the temperature range 30-300 K. The results obtained on samples with different types and dopant concentrations are shown to be in good agreement with those reported in the literature.

引用

页码：2229 / 2232

页数：4

共 8 条

[1] TEMPERATURE-DEPENDENCE OF PHOTOTHERMAL DISPLACEMENT SIGNAL IN SILICON [J].

AMATO, G ;

BENEDETTO, G ;

BOARINO, L ;

SPAGNOLO, R .

JOURNAL OF MODERN OPTICS, 1992, 39 (09) :1803-1809

[2] THERMAL-CONDUCTIVITY AND INTERFACE THERMAL-RESISTANCE OF SI FILM ON SI SUBSTRATE DETERMINED BY PHOTOTHERMAL DISPLACEMENT INTERFEROMETRY [J].

KUO, BSW ;

LI, JCM ;

SCHMID, AW .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1992, 55 (03) :289-296

[3] PHOTOTHERMAL DISPLACEMENT SPECTROSCOPY - AN OPTICAL PROBE FOR SOLIDS AND SURFACES [J].

OLMSTEAD, MA ;

AMER, NM ;

KOHN, S ;

FOURNIER, D ;

BOCCARA, AC .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 32 (03) :141-154

[4] TEMPERATURE-DEPENDENCE OF THE SI AND GE (111)2X1 SURFACE-STATE OPTICAL-ABSORPTION [J].

OLMSTEAD, MA ;

AMER, NM .

PHYSICAL REVIEW B, 1986, 33 (04) :2564-2573

[5]

TOULOUKIAN YS, 1970, THERMOPHYSICAL PROPE, V1, P326

[6] PHOTOTHERMAL SURFACE DEFORMATION TECHNIQUE - A GOAL FOR NONDESTRUCTIVE EVALUATION IN THIN-FILM OPTICS [J].

WELSCH, E .

JOURNAL OF MODERN OPTICS, 1991, 38 (11) :2159-2176

[7] GENERATION OF ELASTIC WAVES BY TRANSIENT SURFACE HEATING [J].

WHITE, RM .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (12) :3559-&

[8]

1988, EMIS DATERVIEWS SERI, V4

← 1 →