THE INFLUENCE OF OXIDATION AND ANNEALING ON INP NATIVE CHEMICAL OXIDES

被引：7

作者：

KOROTCHENKOV, GS

MIKHAILOV, VA

TSVITSINSKY, VI

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 04期

关键词：

D O I：

10.1116/1.583026

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：981 / 984

页数：4

共 15 条

[1]

BUZANEVA EV, 1983, SURF PHYS CHEM MECH, V2, P85

[2]

COGAN D, 1982, THIN SOLID FILMS, V91, P277

[3]

GRIGOROVICH SL, 1981, ELECTRON TECHNOL MAT, P52

[4] THE CHEMICAL-STATE OF THE SURFACES OF (100) ORIENTATED EPITAXIAL LAYERS OF INDIUM-PHOSPHIDE PRODUCED BY THE CLOSED-TUBE-VAPOR-DEPOSITION GROWTH-PROCESS [J].

KIRK, DL .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (03) :491-502

[5]

KOROTCHENKOV GS, 1983, ELECTRON TECHNOL HF, P12

[6]

KOROTCHENKOV GS, 1982, ELECTRON TECHNOL MAT, P22

[7] OXIDE-FILMS ON A(III)B(V) SEMICONDUCTORS [J].

LOSCHKE, K ;

KUHN, G ;

BILZ, HJ ;

LEONHARDT, G .

THIN SOLID FILMS, 1978, 48 (02) :229-236

[8] OXIDATION OF (N)-INP BY NITRIC-ACID [J].

MICHEL, C ;

EHRHARDT, JJ .

ELECTRONICS LETTERS, 1982, 18 (07) :305-307

[9] THE IN-P-O PHASE-DIAGRAM - CONSTRUCTION AND APPLICATIONS [J].

SCHWARTZ, GP ;

SUNDER, WA ;

GRIFFITHS, JE .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (06) :1361-1367

[10] ION-BEAM INDUCED COMPOSITION CHANGES DURING AUGER SPUTTER PROFILING OF THIN AL FILMS ON INP [J].

SKINNER, DK ;

SWANSON, JG ;

HAYNES, CV .

SURFACE AND INTERFACE ANALYSIS, 1983, 5 (01) :38-42

← 1 2 →