SIMULATION OF THIN-FILM STEP COVERAGE AND MICROSTRUCTURE

被引：4

作者：

BRETT, MJ

WESTRA, KL

SMY, T

机构：

来源：

CANADIAN JOURNAL OF PHYSICS | 1989年 / 67卷 / 04期

关键词：

D O I：

10.1139/p89-061

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：347 / 350

页数：4

共 21 条

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[8] STRUCTURAL TRANSITIONS IN BALLISTIC AGGREGATION SIMULATION OF THIN-FILM GROWTH [J].

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[9] SIMULATION OF STRUCTURAL ANISOTROPY AND VOID FORMATION IN AMORPHOUS THIN-FILMS [J].

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[10]

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