CALIBRATION OF THE ELECTRICAL RESPONSE OF PIEZOELECTRIC ELEMENTS AT LOW-VOLTAGE USING LASER INTERFEROMETRY

被引:19
作者
RIIS, E [1 ]
SIMONSEN, H [1 ]
WORM, T [1 ]
NIELSEN, U [1 ]
BESENBACHER, F [1 ]
机构
[1] AARHUS UNIV,INST PHYS,DK-8000 AARHUS C,DENMARK
关键词
D O I
10.1063/1.101064
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:2530 / 2531
页数:2
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