RELATIONSHIP BETWEEN TRANSITION-TEMPERATURE AND X IN V1-XWXO2 FILMS DEPOSITED BY DUAL-TARGET MAGNETRON SPUTTERING

被引：102

作者：

JIN, P

TANEMURA, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 5A期

关键词：

VO2; V1-XWXO2; PHASE TRANSITION; THIN FILMS; DUAL-TARGET SPUTTERING; ADVANCED WINDOW COATINGS;

D O I：

10.1143/JJAP.34.2459

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thin films of V1-2WxO2 were deposited on glass and Si by dual-target sputtering and characterized by thin film X-ray diffraction (XRD), Rutherford backscattering spectrometry (RBS) and spectrophotometry. The relationship between x (0-0.026) and the phase transition temperature tau(c) (0-67 degrees C) in the most applicable range for advanced window coatings was clarified by formation of a single-phase film and precise determination of the amount of doping. Tungsten doping linearly decreases tau(c) by 23 degrees C/at.% W and also significantly reduces the thermal hysteresis loop width in optical transmittance.

引用

页码：2459 / 2460

页数：2

共 9 条

[1]

BEGISHEV AR, 1978, FIZ TVERD TELA, V20, P951

[2] PREPARATION OF VO2 THIN-FILM AND ITS DIRECT OPTICAL BIT RECORDING CHARACTERISTICS [J].

FUKUMA, M ;

ZEMBUTSU, S ;

MIYAZAWA, S .

APPLIED OPTICS, 1983, 22 (02) :265-268

[3]

GRANQVIST CG, 1994, THIN SOLID FILMS, V251, P81

[4] ELECTRICAL AND MAGNETIC PROPERTIES OF V1-XWXO2, O'= X '=0.060 [J].

HORLIN, T ;

NIKLEWSKI, T ;

NYGREN, M .

MATERIALS RESEARCH BULLETIN, 1972, 7 (12) :1515-1524

[5] FORMATION AND THERMOCHROMISM OF VO(2) FILMS DEPOSITED BY RF MAGNETRON SPUTTERING AT LOW SUBSTRATE-TEMPERATURE [J].

JIN, P ;

TANEMURA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (3A) :1478-1483

[6] DOPED VANADIUM-OXIDE FOR OPTICAL SWITCHING FILMS [J].

JORGENSON, GV ;

LEE, JC .

SOLAR ENERGY MATERIALS, 1986, 14 (3-5) :205-214

[7] TRANSPORT PROPERTIES OF TUNGSTEN-DOPED VO-2 [J].

REYES, JM ;

SAYER, M ;

CHEN, R .

CANADIAN JOURNAL OF PHYSICS, 1976, 54 (04) :408-412

[8]

SOBHAN MA, 1994, P SOC PHOTO-OPT INS, V2255, P423, DOI 10.1117/12.185385

[9] THE MICROSTRUCTURE OF SPUTTER-DEPOSITED COATINGS [J].

THORNTON, JA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :3059-3065

← 1 →