DEVELOPMENT OF OPTICAL MONITOR FOR CONTROL OF THIN-FILM DEPOSITION

被引：7

作者：

POWELL, I

ZWINKELS, JCM

ROBERTSON, AR

机构：

来源：

APPLIED OPTICS | 1986年 / 25卷 / 20期

关键词：

D O I：

10.1364/AO.25.003645

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：3645 / 3652

页数：8

共 10 条

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