COMPOSITION OF BINARY-ALLOYS BY SIMULTANEOUS SIMS AND AES MEASUREMENTS

被引：27

作者：

NARUSAWA, T ^{[1
]}

SATAKE, T ^{[1
]}

KOMIYA, S ^{[1
]}

机构：

[1] ULVAC CORP,2500 HAGISONO,CHIGASAKI 253,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期

关键词：

D O I：

10.1116/1.568914

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：514 / 518

页数：5

共 11 条

[1] ENERGY-DISTRIBUTIONS OF SECONDARY IONS
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SLODZIAN, G
[J]. REVUE DE PHYSIQUE APPLIQUEE, 1973, 8 (02): : 105 - 116
[2] CHAPMAN GE, 1972, RADIAT EFF, V13, P121
[3] KOMIYA S, 1974, JPN J APPL PHYS, P363
[4] SIMULTANEOUS OBSERVATIONS OF PARTIALLY OXIDIZED SURFACES BY AES AND SIMS FOR AL, SI, TI, V, AND CR
KOMIYA, S
NARUSAWA, T
SATAKE, T
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 361 - 365
[5] KOPITZKI K, 1962, Z NATURFORSCH PT A, VA 17, P346
[6] COMPOSITION PROFILE OF ION-PLATED AU FILM ON CU ANALYZED BY AES AND SIMS DURING XE ION-BOMBARDMENT
NARUSAWA, T
KOMIYA, S
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 312 - 316
[7] PALMBERG PW, 1972, HDB AUGER ELECTRON S
[8] QUANTUM-MECHANICAL MODEL FOR IONIZATION AND EXCITATION OF ATOMS DURING SPUTTERING
SCHROEER, JM
RHODIN, TN
BRADLEY, RC
[J]. SURFACE SCIENCE, 1973, 34 (03) : 571 - 580
[9] CALCULATION FROM FIRST PRINCIPLES OF YIELD OF IONS AND EXCITED NEUTRAL ATOMS SPUTTERED FROM METAL-SURFACES
SCHROEER, JM
[J]. SURFACE SCIENCE, 1973, 35 (01) : 485 - 486
[10] QUANTITATIVE AUGER ANALYSIS OF COPPER-NICKEL ALLOY SURFACES AFTER ARGON ION-BOMBARDMENT
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ONO, M
NAKAYAMA, K
[J]. SURFACE SCIENCE, 1973, 36 (02) : 817 - 821