THE GROWTH OF THIN, HEAVILY DOPED LAYERS FOR HOT-ELECTRON DEVICES

被引:4
作者
HARRIS, JJ
WOODCOCK, JM
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 02期
关键词
D O I
10.1116/1.582486
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:196 / 198
页数:3
相关论文
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