THICKNESS OF NATURAL OXIDE-FILMS DETERMINED BY AES AND XPS WITH WITHOUT SPUTTERING

被引：101

作者：

MATHIEU, HJ

DATTA, M

LANDOLT, D

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 02期

关键词：

D O I：

10.1116/1.573260

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：331 / 335

页数：5

共 25 条

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