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GAS-PHASE CHEMISTRY IN THE PROCESSING OF MATERIALS FOR THE SEMICONDUCTOR INDUSTRY

被引：19
作者：
RYAN, KR
PLUMB, IC
机构：
来源：
CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES | 1988年 / 15卷 / 02期
关键词：
D O I：
10.1080/10408438808243737
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：153 / 200
页数：48
相关论文
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